Introduction to focused ion beams : instrumentation, theory, techniques, and practice

edited by Lucille A. Giannuzzi, Fred A. Stevie

Introduction to Focused Ion Beams is geared towards techniques and applications. This is the only text that discusses and presents the theory directly related to applications and the only one that discusses the vast applications and techniques used in FIBs and dual platform instruments.

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[目次]

  • The Focused Ion Beam Instrument.- Ion - Solid Interactions.- Focused Ion Beam Gases for Deposition and Enhanced Etch.- Three-Dimensional Nanofabrication Using Focused Ion Beams.- Device Edits and Modifications.- The Uses of Dual Beam FIB in Microelectronic Failure Analysis.- High Resolution Live Imaging of FIB Milling Processes for Optimum Accuracy.- FIB for Materials Science Applications - a Review.- Practical Aspects of FIB Tem Specimen Preparation.- FIB Lift-Out Specimen Preparation Techniques.- A FIB Micro-Sampling Technique and a Site Specific TEM Specimen Preparation Method.- Dual-Beam (FIB-SEM) Systems.- Focused Ion Beam Secondary Ion Mass Spectrometry (FIB-SIMS).- Quantitative Three-Dimensional Analysis Using Focused Ion Beam Microscopy.- Application of FIB in Combination with Auger Electron Spectroscopy.

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この本の情報

書名 Introduction to focused ion beams : instrumentation, theory, techniques, and practice
著作者等 Stevie, F. A.
Stevie Fred A. (North Carolina State University Raleigh)
Giannuzzi Lucille A.
出版元 Springer
刊行年月 c2005
ページ数 xiv, 357 p.
大きさ 25 cm
ISBN 0387231161
NCID BA70832500
※クリックでCiNii Booksを表示
言語 英語
出版国 アメリカ合衆国
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