Microelectronic materials  hbk. ~ pbk.

C.R.M. Grovenor

This practical book shows how an understanding of structure, thermodynamics, and electrical properties can explain some of the choices of materials used in microelectronics, and can assist in the design of new materials for specific applications. It emphasizes the importance of the phase chemistry of semiconductor and metal systems for ensuring the long-term stability of new devices. The book discusses single-crystal and polycrystalline silicon, aluminium- and gold-based metallisation schemes, packaging semiconductor devices, failure analysis, and the suitability of various materials for optoelectronic devices and solar cells. It has been designed for senior undergraduates, graduates, and researchers in physics, electronic engineering, and materials science.

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[目次]

  • Semiconducting materials
  • contacts, devices and integrated circuits
  • the growth of single crystals of semiconducting materials
  • polycrystalline conducting thin films
  • the metallurgy of aluminium and gold based metallization schemes
  • deposition and properties of insulating films
  • the packaging of semiconductor devices
  • materials for optoelectronics devices
  • materials for solar cells
  • failure analysis and the investigation of the structure and composition of microelectronic materials.

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この本の情報

書名 Microelectronic materials
著作者等 Grovenor, C. R. M.
シリーズ名 Graduate student series in materials science and engineering
巻冊次 hbk.
pbk.
出版元 A. Hilger
刊行年月 c1989
ページ数 x, 544 p.
大きさ 24 cm
ISBN 0852742703
085274269X
NCID BA07037705
※クリックでCiNii Booksを表示
言語 英語
出版国 イギリス
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